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Preparation and characterization of ZnO-TiO(2) films obtained by sol-gel method

机译:溶胶-凝胶法制得的ZnO-TiO(2)薄膜的制备与表征

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摘要

The sol-gel route has been applied to obtain ZnO-TiO(2) thin films. For comparison, pure TiO(2) and ZnO films are also prepared from the corresponding solutions. The films are deposited by a spin-coated method on silicon and glass substrates. Their structural and vibrational properties have been studied as a function of the annealing temperatures (400-750 degrees C). Pure ZnO films crystallize in a wurtzite modification at a relatively low temperature of 400 degrees C, whereas the mixed oxide films show predominantly amorphous structure at this temperature. XRD analysis shows that by increasing the annealing temperatures, the sol-gel Zn/Ti oxide films reveal a certain degree of crystallization and their structures are found to be mixtures of wurtzite ZnO, Zn(2)TiO(4), anatase TiO(2) and amorphous fraction. The XRD analysis presumes that Zn(2)TiO(4) becomes a favored phase at the highest annealing temperature of 750 degrees C. The obtained thin films are uniform with no visual defects. The optical properties of ZnO-TiO(2) films have been compared with those of single component films (ZnO and TiO(2)). The mixed oxide films present a high transparency with a slight decrease by increasing the annealing temperature. (C) 2011 Elsevier B.V. All rights reserved.
机译:溶胶-凝胶路线已应用于获得ZnO-TiO(2)薄膜。为了进行比较,还从相应的溶液中制备了纯TiO(2)和ZnO薄膜。膜通过旋涂法沉积在硅和玻璃基板上。已经研究了它们的结构和振动特性与退火温度(400-750摄氏度)的关系。纯ZnO薄膜在400摄氏度的较低温度下以纤锌矿变型结晶,而混合氧化物薄膜在该温度下主要显示出非晶态结构。 XRD分析表明,通过提高退火温度,溶胶-凝胶Zn / Ti氧化物膜显示出一定程度的结晶,其结构为纤锌矿ZnO,Zn(2)TiO(4),锐钛矿型TiO(2)的混合物)和无定形部分。 X射线衍射分析推测Zn(2)TiO(4)在750摄氏度的最高退火温度下成为有利相。获得的薄膜均匀,无视觉缺陷。 ZnO-TiO(2)膜的光学性质已与单组分膜(ZnO和TiO(2))的光学性质进行了比较。通过提高退火温度,混合氧化物膜呈现出高透明性并且略有降低。 (C)2011 Elsevier B.V.保留所有权利。

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